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AODD PUMPS

SEMI Series

Semiconductor industry, pharmaceutical sector, ultra-pure processes

MAIN CHARACTERISTICS

SEMI series pumps are designed specifically for applications in the semiconductor industry.
The entire assembly process of these unique pumps takes place in an ISO Class 5 environment (according to ISO 14644-1 standard). In this process, the parts are double cleaned, tested with deionized water and then packed airtight in plastic film.

VIEW MANUALS
  • All parts of the SEMI T and SEMI H pumps that come in contact with fluids are made of PTFE (polytetrafluoroethylene).
  • The housing parts of the SEMI E pump that come in contact with liquids are made of UPPE (ultrapure polyethylene).
  • The housing parts of the SEMI S pump that come in contact with liquids are made of AISI 316L stainless steel.
  • The housing parts of the SEMI S pump that come in contact with liquids are made of AISI 316L stainless steel.

FEATURES OF DELLMECO PUMPS

  • No metal parts (even on an atomic scale)
  • No elastomeric O-ring seals
  • No lubrication required in the air valve
  • Assembly in Clean Room class 100, tested with deionized water and double-packed
  • TFM diaphragms: robust and reliable
  • Four material variants for different applications, resistant to a maximum temperature of 200°C
  • Milled from solid material in an advanced CNC machining and turning center
  • Pulsation dampers, leak detection and electronic/pneumatic control and monitoring available for all pump sizes
  • Simple “Preventive Maintenance Planning” (PMP) with only 40% of spare parts compared to similar pumps
  • Capacities from 10 to 100 l/min
  • 4 models of PTFE/UPPE (ultrapure polyethylene) for acids and alkalis, without metal parts - not even atomic scale - and resistant to +130°C (SEMI T series)
  • 2 models made of PTFE for applications with acids and alkalis up to +200°C (SEMI H series)
  • 4 models from UPPE for slurries (SEMI E series)
  • 2 models with stainless steel middle housing for solvents (SEMI S series)

HOW TO INSTALL DELLMECO PUMPS? 

Self-priming application

The suction height reaches up to a maximum of 8 meters. This depends on the construction materials used and the application parameters. All data are based on pumping water at 20 °C.

Underwater operation

Our pumps can operate fully submerged. The materials used must be suitable for the surrounding liquid, and the outlet must be above the liquid level.

Positive suction pressure

This method is suitable for complete emptying of storage tanks, settling tanks or similar reservoirs. The optimum inlet pressure is between 0.2 and 0.3 bar.

OVERVIEW SEMI PUMPS

Model:SEMI T
Materials: center housing made of TFM/PTFE; side housings made of UPPE
Pump sizes: 10, 20, 50
Applications: acids and alkalis

Model:SEMI E
Materials: UPPE center housing and side housings
Pump sizes: 10, 20, 50
Applications: slurries

Model:SEMI H
Materials: center housing made of UPPE; side housings made of PTFE
Pump sizes: 10, 20
Applications: hot applications with acids and alkalis

Model:SEMI S
Materials: center housing AISI 316L stainless steel | side housings conductive PTFE
Pump sizes: 20, 50
Applications: solvents

TECHNICAL DATA

SEMI ADDITIONAL EQUIPMENT

Pneumatic stroke counting system (code SC5, SC6)
Codes SC5 and SC6 allow the strokes of the pump to be counted automatically. The pressure change in the air chamber behind one of the diaphragms is recorded via a pressure sensor. For correct operation, the counting system must be supplied with an air pressure of at least 1.5 bar.

There are two variants of the counting system:
– SC5 – pressure sensor 1-10 bar, fully assembled with plug and 5 m cable; straight NPT ¼” adapter; hose DN 4/6, length 2.5 m
– SC6 – as SC5, but including stroke counter

Diaphragm sensor (code DM1, DM3, DM4)
The diaphragm sensor detects diaphragm rupture. It is installed in the silencer and is suitable for use with all fluids. There are three types:
– DM1: 2-wire Namur, intrinsically safe EEx ia IIC T6
– DM3: 3-wire version
– DM4: 3-wire with plug (only for pump sizes 10, 20 and 50)

Flaretek© connections for PFA pipes (code CF)
Flaretek© connections can be applied to the suction and discharge connections of the SEMI T and SEMI H pumps.